Nanomechanical resonators co-integrated with CMOS as high-performance mass sensors

Mechanical resonators with deep submicron dimensions are a specific type of nano-electromechanical system (NEMS), which have a strong interest in two areas: as high sensitivity sensors; and as building blocks for high-frequency telecommunication systems. Practical applications of mechanical resonators require on-chip signal processing, where optimal performance is achieved in case of monolithic integration with CMOS circuits. Such NEMS/CMOS are very promising systems that combine outstanding sensing attributes, thanks to the high-resonance frequency mobile mechanical part, with the possibility to electrically detect the output signal in enhanced conditions (reduction of parasitic capacitive coupling). In terms of technology, combining fabrication processes of nanomechanical resonators with a standard CMOS technology is... [read full story]